SELF-CALIBRATING MECHANISM AND SELF-CALIBRATING METHOD FOR FLOW RATE SENSOR, AND DIAGNOSTIC MECHANISM AND DIAGNOSTIC METHOD FOR FLUID SENSOR

摘要

A valve fully closing part; a calibrating volume calculation part that calculates a calibrating volume on the basis value of an integration of a flow rate measured value outputted from a flow rate sensor in a fluid parameter changing interval; and a calibration part that calibrates a flow rate on the basis of the calculated calibrating volume and a preset reference volume are provided.