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Preventing the cracking of passivation layers on ultra-thick metals
Preventing the cracking of passivation layers on ultra-thick metals
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机译:防止超厚金属上的钝化层破裂
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摘要
A device includes a top metal layer; a UTM line over the top metal layer and having a first thickness; and a passivation layer over the UTM line and having a second thickness. A ratio of the second thickness to the first thickness is less than about 0.33.
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