Multi-Axis Tilt Sensor for Correcting Gravitational Effects on the Measurement of Pressure by a Capacitance Diaphragm Gauge

摘要

A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.