VERSATILE, FLEXIBLE, AND ROBUST MEMS/NEMS SENSOR FOR DECOUPLED MEASURING OF THREE-DIMENSIONAL FORCES IN AIR OR LIQUIDS

摘要

A force measuring device. The device comprises an x-axis sensor beam for measuring x-direction forces, a y-axis sensor beam for measuring y-direction forces, a z-axis sensor beam for measuring z-direction forces, and wherein the x-axis, y-axis and z-axis sensor beams are decoupled such that forces exerted by a specimen in one direction do not exert substantial forces on the other two sensor beams.