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Versatile, flexible, and robust MEMS/NEMS sensor for decoupled measuring of three-dimensional forces in air or liquids
Versatile, flexible, and robust MEMS/NEMS sensor for decoupled measuring of three-dimensional forces in air or liquids
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机译:多功能,灵活且坚固的MEMS / NEMS传感器,用于解耦测量空气或液体中的三维力
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摘要
A force measuring device. The device comprises an x-axis sensor beam for measuring x-direction forces, a y-axis sensor beam for measuring y-direction forces, a z-axis sensor beam for measuring z-direction forces, and wherein the x-axis, y-axis and z-axis sensor beams are decoupled such that forces exerted by a specimen in one direction do not exert substantial forces on the other two sensor beams.
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