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Method for making a redistributed wafer using transferrable redistribution layers

机译:使用可转移的再分布层制造再分布晶片的方法

摘要

A method of making redistributed electronic devices that includes providing a wafer having a plurality of electronic devices, each electronic device having a pattern of contact areas forming die pads. The method also includes forming redistribution layers on a temporary substrate having a pattern of contact areas forming wafer bonding pads matching the die pads and a pattern of contact areas forming redistributed pads different than the wafer bonding pads, the wafer bonding pads are coupled to the redistributed pads through a plurality of stacked conductive and insulating layers. The die pads are coupled to the wafer bonding pads, and the temporary substrate is removed. The wafer and redistribution layers are then divided into a plurality of redistributed electronic devices.
机译:一种制造重新分布的电子设备的方法,该方法包括提供具有多个电子设备的晶片,每个电子设备具有形成管芯焊盘的接触区域的图案。该方法还包括在临时基板上形成重新分布层,该临时基板具有形成与管芯焊盘匹配的晶片接合焊盘的接触区域的图案和与晶片接合焊盘不同的形成重新分布焊盘的接触区域的图案,晶片接合焊盘耦合到重新分布的晶片。垫穿过多个堆叠的导电和绝缘层。管芯焊盘被耦合到晶片焊盘,并且临时衬底被去除。然后将晶片和再分布层划分为多个再分布的电子器件。

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