首页> 外国专利> Composition and method for production thereof, porous material and method for production thereof, interlayer insulating film, semiconductor material, semiconductor device, and low-refractive-index surface protection film

Composition and method for production thereof, porous material and method for production thereof, interlayer insulating film, semiconductor material, semiconductor device, and low-refractive-index surface protection film

机译:组合物及其生产方法,多孔材料及其生产方法,层间绝缘膜,半导体材料,半导体器件和低折射率表面保护膜

摘要

Disclosed is a composition comprising a hydrolysate of an alkoxysilane compound, a hydrolysate of a siloxane compound represented by Formula (1), a surfactant, and an element having an electronegativity of 2.5 or less. In Formula (1), RA and RB independently represent a hydrogen atom, a phenyl group, —CaH2a+1, —(CH2)b(CF2)cCF3 or —CdH2d−1, RA and RB are not both hydrogen atoms simultaneously, RC and RD independently represent a single bond that links a silicon atom and an oxygen atom to form a cyclic siloxane structure, or each independently represent a hydrogen atom, a phenyl group, —CaH2a+1, —(CH2)b(CF2)cCF3, or —CdH2d−1, a represents an integer of 1 to 6, b represents an integer of 0 to 4, c represents an integer of 0 to 10, d represents an integer of 2 to 4, and n represents an integer of 3 or greater.; embedded image
机译:公开了一种组合物,其包含烷氧基硅烷化合物的水解物,由式(1)表示的硅氧烷化合物的水解物,表面活性剂和电负性为2.5以下的元素。式(1)中,R A 和R B 独立地表示氢原子,苯基,-C a H 2a +1 ,—(CH 2 b (CF 2 c CF 3 或-C d H 2d-1 ,R A 和R B 都不都是氢原子同时,R C 和R D 独立地表示连接硅原子和氧原子以形成环状硅氧烷结构的单键,或各自独立地表示氢原子,苯基,-C a H 2a + 1 ,-(CH 2 b (CF 2 c CF 3 或-C d H 2d-1 , a表示1〜6的整数,b表示0〜4的整数,c表示0〜10的整数,d表示2〜4的整数,n表示3以上的整数。 “嵌入式图像”

著录项

  • 公开/公告号US8603588B2

    专利类型

  • 公开/公告日2013-12-10

    原文格式PDF

  • 申请/专利权人 KAZUO KOHMURA;HIROFUMI TANAKA;

    申请/专利号US20090934767

  • 发明设计人 KAZUO KOHMURA;HIROFUMI TANAKA;

    申请日2009-03-30

  • 分类号B05D3/02;B05D3/06;C09D183/06;

  • 国家 US

  • 入库时间 2022-08-21 15:59:00

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