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Composition and method for production thereof, porous material and method for production thereof, interlayer insulating film, semiconductor material, semiconductor device, and low-refractive-index surface protection film
Composition and method for production thereof, porous material and method for production thereof, interlayer insulating film, semiconductor material, semiconductor device, and low-refractive-index surface protection film
Disclosed is a composition comprising a hydrolysate of an alkoxysilane compound, a hydrolysate of a siloxane compound represented by Formula (1), a surfactant, and an element having an electronegativity of 2.5 or less. In Formula (1), RA and RB independently represent a hydrogen atom, a phenyl group, —CaH2a+1, —(CH2)b(CF2)cCF3 or —CdH2d−1, RA and RB are not both hydrogen atoms simultaneously, RC and RD independently represent a single bond that links a silicon atom and an oxygen atom to form a cyclic siloxane structure, or each independently represent a hydrogen atom, a phenyl group, —CaH2a+1, —(CH2)b(CF2)cCF3, or —CdH2d−1, a represents an integer of 1 to 6, b represents an integer of 0 to 4, c represents an integer of 0 to 10, d represents an integer of 2 to 4, and n represents an integer of 3 or greater.; 展开▼
机译:公开了一种组合物,其包含烷氧基硅烷化合物的水解物,由式(1)表示的硅氧烷化合物的水解物,表面活性剂和电负性为2.5以下的元素。式(1)中,R A Sup>和R B Sup>独立地表示氢原子,苯基,-C a Sub> H 2a +1 Sub>,—(CH 2 Sub>) b Sub>(CF 2 Sub>) c Sub> CF 3 Sub>或-C d Sub> H 2d-1 Sub>,R A Sup>和R B Sup>都不都是氢原子同时,R C Sup>和R D Sup>独立地表示连接硅原子和氧原子以形成环状硅氧烷结构的单键,或各自独立地表示氢原子,苯基,-C a Sub> H 2a + 1 Sub>,-(CH 2 Sub>) b Sub>(CF 2 Sub>) c Sub> CF 3 Sub>或-C d Sub> H 2d-1 Sub>, a表示1〜6的整数,b表示0〜4的整数,c表示0〜10的整数,d表示2〜4的整数,n表示3以上的整数。 化学>
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