MIXED FABRICATING TECHNIQUE FOR HIGH PRECISION METAL MASK PLATE

摘要

A fabricating technique for a high precision metal mask plate comprises: fabricating a substrate with a certain thickness by electroforming a nickel alloy, the substrate having an opening, that is, a through-hole; and etching a recess with a certain depth on a face of a mask substrate through an etching technique, so as to enable an opening size of the etched face to be greater than an opening size of an unetched face, and enable a hole wall to be a fillet to form a taper. The metal mask plate fabricated by applying a mixed technique of electroforming plus etching has advantages of low cost, good perforation quality, and high perforation precision, so as to reduce the thickness of a valid model, and improve an evaporation coating filming ratio during an evaporation coating process of the mask plate.