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HIGH PERFORMANCE MINIATURE RF SENSOR FOR USE IN MICROELECTRONICS PLASMA PROCESSING TOOLS
HIGH PERFORMANCE MINIATURE RF SENSOR FOR USE IN MICROELECTRONICS PLASMA PROCESSING TOOLS
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机译:高性能微型射频传感器,用于微电子等离子加工工具
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摘要
A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.
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