METHOD FOR IMPROVING TRANSMISSION EFFICIENCY OF WAFERS IN TARGET CHAMBER

摘要

Provided is a method for improving the transmission efficiency of wafers in a target chamber, comprising: four functional modules, i.e. a main manipulator (1), an auxiliary manipulator (2), an orientation table (3) and a target table (4); the main manipulator (1) being subdivided into several sub-modules, i.e. a sub-module for sending back to a wafer bin (5), a sub-module for sending to the orientation table (6), a sub-module for taking a wafer from the wafer bin (7), a sub-module for taking a wafer from the target table (8), a sub-module for status errors (17) and a sub-module for task termination (19); the auxiliary manipulator (2) being subdivided into two sub-modules, i.e. a sub-module for sending a wafer to the target table and a sub-module for taking a wafer from the orientation table (10); the orientation table being subdivided into three sub-modules, i.e. a sub-module for waiting for the auxiliary manipulator to take a wafer (11), a sub-module for waiting for the main manipulator to send a wafer (12) and a sub-module for orientation (13); the target table being subdivided into three sub-modules, i.e. a sub-module for injection (14), a sub-module for waiting for the auxiliary manipulator to send a wafer (15) and a sub-module for waiting for the main manipulator to take a wafer (16); and a module for movement errors (18) existing in each large module. The present invention is characterized in that the internal events of the main manipulator (1), the auxiliary manipulator (2), the orientation table (3) and the target table (4) are executed respectively within themselves and are coordinated and allocated uniformly by an upper-layer module, thereby avoiding confusion phenomena in the program and the flow, so that the program and the flow are more compact and clearer. The present invention can simultaneously transmit three wafers in a target chamber, thereby maximally improving the utilization rate of the manipulator, shortening the idle time and improving the transmission efficiency.