首页> 外国专利> MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS, AND METHOD FOR THE PRODUCTION OF A SENSOR ELEMENT FOR THE MEASURING PROBE

MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS, AND METHOD FOR THE PRODUCTION OF A SENSOR ELEMENT FOR THE MEASURING PROBE

机译:用于测量薄层厚度的测量探头以及用于该测量探头的传感器元件的制造方法

摘要

The invention relates to a measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received in the housing at least slightly moveably along a longitudinal axis and which comprises at least one winding device, which is allocated to the longitudinal axis, having a spherical positioning cap facing the outer front face of the housing, said cap being arranged in the longitudinal axis, wherein the spherical positioning cap has a basic body that has a cylindrical core section and a pole cap arranged on a front face of the core section, wherein the winding device is allocated to the spherical positioning cap, said winding device being formed from a discoidal or annular carrier with at least one Archimedean coil arranged thereon and with the basic body consisting of a ferritic material and the pole cap consisting of a hard metal.
机译:用于测量薄层厚度的测量探针技术领域本发明涉及一种用于测量具有外壳的薄层的厚度的测量探针,该外壳具有至少一个传感器元件,该传感器元件沿纵向轴线至少略微可移动地容纳在该外壳中,并且包括至少一个卷绕装置,该卷绕装置包括:分配给纵向轴线的是一个球形的定位帽,该帽朝向壳体的外侧面,所述帽沿纵向轴线布置,其中球形的定位帽具有一个具有圆柱形芯部的基体和一个设置在其上的极帽。芯部段的前表面,其中绕组装置配属于球形定位帽,所述绕组装置由盘状或环形载体形成,其上布置有至少一个阿基米德线圈,并且基体由铁素体材料制成,并且极帽由硬质金属制成。

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