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Measuring probe for measuring the thickness of thin layers, and method for the production of a sensor element for the measuring probe
Measuring probe for measuring the thickness of thin layers, and method for the production of a sensor element for the measuring probe
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机译:用于测量薄层厚度的测量探针以及用于该测量探针的传感器元件的制造方法
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摘要
The invention relates to a measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received in the housing at least slightly moveably along a longitudinal axis and which comprises at least one winding device, which is allocated to the longitudinal axis, having a spherical positioning cap facing the outer front face of the housing, said cap being arranged in the longitudinal axis, wherein the spherical positioning cap has a basic body that has a cylindrical core section and a pole cap arranged on a front face of the core section, wherein the winding device is allocated to the spherical positioning cap, said winding device being formed from a discoidal or annular carrier with at least one Archimedean coil arranged thereon and with the basic body consisting of a ferritic material and the pole cap consisting of a hard metal.
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