首页> 外国专利> Bearing for an impact sensitive substrate treatment apparatus

Bearing for an impact sensitive substrate treatment apparatus

机译:用于冲击敏感基材处理设备的轴承

摘要

Apparatus (1) for substrate treatment with a highly focused light stroke, comprises a light source (4) and a holder (5) of the light source to a distance to a substrate (2), and a conveyor (7), which is provided for a continuous substrate transport. The substrate is movable relative to the light stroke in transport direction by means of the conveyor. The conveyor is supported vertically relative to a supporting surface and the holder relative to the conveyor. Apparatus (1) for substrate treatment with a highly focused light stroke, comprises a light source (4) and a holder (5) of the light source to a distance to a substrate (2), and a conveyor (7), which is provided for a continuous substrate transport. The substrate is movable relative to the light stroke in transport direction by means of the conveyor. The conveyor is supported vertically relative to a supporting surface and the holder relative to the conveyor. The highly focused light stroke is problematic by (a) at least one light source for generating light stroke on one of the outer surfaces of the substrate, (b) the distance between the light source and the substrate, and (c) critical vibrations from the supporting surface of the apparatus. A double vibration-damping bearing is provided between the supporting surface and the conveyor many times and/or between the conveyor and the holder. The bearing has a predetermined bearing vibration. An independent claim is also included for mounting the shock-sensitive apparatus.
机译:用于具有高度聚焦的光行程的基板处理的设备(1),包括光源(4)和与基板(2)保持一定距离的光源支架(5),以及传送带(7),该传送带提供连续的基材运输。基材可通过输送机相对于光冲程沿输送方向移动。输送机相对于支撑表面竖直地支撑,而支架相对于输送机垂直地支撑。用于具有高度聚焦的光行程的基板处理的设备(1),包括光源(4)和与基板(2)保持一定距离的光源支架(5),以及传送带(7),该传送带提供连续的基材运输。基材可通过输送机相对于光冲程沿输送方向移动。输送机相对于支撑表面竖直地支撑,而支架相对于输送机垂直地支撑。 (a)至少一个用于在基板的外表面之一上产生光冲程的光源,(b)光源与基板之间的距离,以及(c)来自设备的支撑表面。在支撑表面与输送机之间和/或在输送机与保持器之间多次设置有双减振轴承。轴承具有预定的轴承振动。还包括用于安装冲击敏感设备的独立权利要求。

著录项

  • 公开/公告号EP2733731A1

    专利类型

  • 公开/公告日2014-05-21

    原文格式PDF

  • 申请/专利权人 VON ARDENNE GMBH;

    申请/专利号EP20130005078

  • 申请日2013-10-24

  • 分类号H01L21/67;H01L21/677;F16F15/023;

  • 国家 EP

  • 入库时间 2022-08-21 15:45:46

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号