DEVICE FOR TRANSPORTING FLEXIBLE SUBSTRATE, AND SYSTEM FOR MANUFACTURING DISPLAY DEVICE OR ELECTRICAL CIRCUIT

摘要

A device (1) for transporting a flexible substrate (S), the substrate being shaped as a belt and having flexibility, has a supply roller (5b) for paying out the substrate (S), a recovery roller (6b) for taking up the substrate (S), and a drive unit (8) for driving the supply roller (5b) and the recovery roller (6b) in directions (X, Z) that intersect the direction of advance of the substrate (S). The supply roller (5b) is guided by a first rail (3), and the recovery roller (6b) is guided by a second rail (4). A rail drive mechanism (7) changes the interval between the rollers (5b, 6b). Processing apparatuses (PA) arranged between the rails (3, 4) form a film on the resin or stainless steel substrate (S), expose the substrate to light, wash the substrate, and perform other processes. There is a plurality of the processing apparatuses (PA) along the rails (3, 4). The substrate (S) being carried along the rails (3, 4) together with the rollers (5b, 6b) is sequentially processed by the plurality of processing apparatuses (PA), whereby an organic EL element is formed on the substrate (S).