Laser Direct Writing of Copper Circuits on Flexible Substrates for Electronic Devices

摘要

There are increasing interests in flexible electronic devices for sports, entertainment, health monitoring and medical cares. In particular, flexible sensors (wearable strain senor or robotic control-lable sensors) attached on clothing or human skins could be used as a motion detector. Copper has been considered as a potential alternative material for other expensive noble metals. By laser-induced direct reduction and transfer printing, microsensors based on conducting copper circuits was fabri-cated on polydimethylsiloxane or polyimide as cheap and sensitive devices. A specific electrical re-sistivity of 240 μΩ?cm of Cu circuit was successfully achieved in an electrode of about 40 μm in thickness. We demonstrate a motion sensing based on laser-reduced copper circuits with a high sen-sitivity and mechanical robustness.