Manipulation technique of multiple bubbles using an EWOD principle and micro-object manipulation method

摘要

PURPOSE: A bubble control technology and a micro material control method using the same are provided to control the location and movement of a micro material under a water environment. CONSTITUTION: An upper layer (10) includes an electrode (12), a dielectric layer (13), and a hydrophobic layer (14). The electrode controls the location or movement of bubble (30) with an EWOD method. The one surface of a glass wafer (11) is coated and forms a dielectric layer. A lower layer (20) includes a wafer (21), a ground layer (22), and a hydrophobic layer (24). Liquid is included between the upper layer and the lower layer.