METHOD FOR MANUFACTURING FREE-STANDING TYPE THIN FILM AND FREE-STANDING TYPE THIN FILM MANUFACTURED BY METHOD

摘要

The present invention relates to a method for manufacturing a free-standing type thin film, capable of manufacturing a free-standing type thin film with a thin thickness, and a free-standing type thin film manufactured by the method. The method for manufacturing a free-standing type thin film according to the present invention comprises the steps of: (a) preparing a substrate having a hole formed therein; (b) coating liquid-phase PDMS on the substrate having the hole formed therein, to form a liquid-phase PDMS film; and (c) transferring the liquid-phase PDMS film to a solid oxidation thin film. According to the method for manufacturing a free-standing type thin film of the present invention, the liquid-phase PDMS that is not polymerized is coated on the substrate having the hole formed therein and the liquid-phase PDMS coat is transferred to the oxidation thin film, thereby easily manufacturing the free-stand type thin film with a thin thickness in the hole of the substrate even without performing the conventional processes of forming a thin film through spin coating, removing a sacrificial layer, and transferring the thin film to another substrate.;COPYRIGHT KIPO 2014