FLEXIBLE MICRO BUMPS OPERABLY COUPLED TO ARRAY OF NANO-PIEZOELECTRIC SENSORS

摘要

Implementations and techniques for manufacturing flexible micro bumps operably coupled to an array of nano-piezoelectric sensors are generally disclosed. The micro bumps and coupled nano-piezoelectric device have use at least as tactile sensors. A wide variety of configurations of the micro bumps and the nano-piezoelectric device are anticipated.