MANUFACTURING METHOD OF TRANSPARENT CONDUCTIVE OXIDE THIN FILM AND TRANSPARENT CONDUCTIVE OXIDE THIN FILM MADE BY SAME

摘要

A manufacturing method of a transparent conductive oxide thin film according to the present invention comprises a step of forming a thin film made of a transparent conductive oxide with a solution process; a step of thermally processing the thin film made of the transparent conductive oxide; a step of performing a hydrogen plasma-treatment on the thin film made of the transparent conductive oxide; and a step of performing surface processing on the thin film made of the transparent conductive oxide. The manufacturing method of a transparent conductive oxide thin film according to the present invention economically rapidly forms the thin film made of the transparent conductive oxide by using a solution process, improves electrical characteristics of the thin film by performing a hydrogen plasma-treatment, and solves a problem that the transmittance is reduced by a metal cluster formed on the surface of the thin film after the hydrogen plasma-treatment through surface processing using an acidic fluid, thereby effectively manufacturing the transparent conductive oxide thin film having the improved electrical characteristics and optical characteristics.;COPYRIGHT KIPO 2014;[Reference numerals] (S10) Form a thin film with a transparent conductive oxide; (S20) Thermally process the thin film; (S30) Plasma-process the thin film; (S40) Surface-process the thin film with an acidic fluid