NANOPARTICLE-TYPE SUPERLATTICE THIN FILM GROWING METHOD OF THERMOELECTRIC MODULE BY SOLUTION PROCESS

摘要

The present invention relates to a method for growing a nanoparticle superlattice thin film of a thermoelectric element by a solution process. The present invention comprises a S1 step of repeating a solution process of dropping metal source containing solution on a substrate while rotating the substrate to form a plurality of thin films and forming a metal oxide buffer layer having preferred directivity; a S2 step of thermal annealing the buffer layer to be crystalized; a S3 step of forming a metal oxide thin film layer by a solution process of dropping metal source containing solution on the buffer layer of the rotated substrate while rotating the substrate passing through the S2 step; and a S4 of thermal annealing the buffer layer formed in the S2 step and the thin film layer formed in the S3 step to be crystalized. [Reference numerals] (S1) Form a ZnO buffer layer on a substrate through spin coating; (S2) Crystalize a buffer layer; (S3) Form a thin film layer on the buffer layer through spin coating; (S4) Crystalize the buffer layer and the thin film layer