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Processing Method for Creating Ultra-Thin Lead Zirconate Titanate (PZT) Films Via Chemical Solution Deposition

机译：通过化学溶液沉积制备超薄锆钛酸铅（pZT）薄膜的加工方法

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This report summarizes the effort to use modifications to a lead zirconate titanate (PZT) chemical solution process to create high performance ferroelectric, dielectric, and piezoelectric thin films with reduced film thicknesses.

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作者
Piekarz, R.; Polcawich, R. G.;
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年度 2008
页码 p.1-18
总页数 18
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Lead zirconate titanates; Thin films; Piezoelectric materials; Complementary metal oxide semiconductors; Solutions(General); Deposition; Chemical reactions;

机译：锆钛酸铅;薄膜;压电材料;互补金属氧化物半导体;溶液（通用）;沉积;化学反应;

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专利

1. Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition [J] . T. Kobayashi, M. Ichiki, J. Tsaur, Thin Solid Films . 2005,第1a2期

机译：多层涂覆工艺对化学溶液沉积法合成锆钛酸铅（PZT）薄膜取向和微观结构的影响
2. Ordered Mesoporous Thin Film Ferroelectrics of Biaxiaily Textured Lead Zirconate Titanate (PZT) by Chemical Solution Deposition [J] . Christian Reitz, Philipp M. Leufke, Horst Hahn Chemistry of Materials: A Publication of the American Chemistry Society . 2014,第6期

机译：用化学溶液沉积法制备有序织构的钛酸锆钛酸铅（PZT）介孔薄膜铁电体
3. ROOM-TEMPERATURE DEPOSITION AND MAGNETO-OPTICAL PROPERTIES OF TRANSPARENT COBALT/LEAD ZIRCONATE TITANATE (PZT) NANOCOMPOSITE FILMS BY AEROSOL DEPOSITION [J] . Jae-Hyuk Park, Jun Akedo Ceramic Engineering and Science Proceedings . 2010,第8期

机译：气溶胶沉积透明钴/铅钛酸钛酸盐（PZT）纳米复合薄膜的室温和磁光性能
4. Lowering Crystallization Temperature of Lead Zirconate Titanate (PZT) Thin Film Synthesized by Solution-Combustion Synthesis Method using a Lead Titanate (PTO) Seeding Layer [C] . Zhongzheng Sun, Phan Trong Tue, Yutaka Majima 応用物理学会春季学術講演会;応用物理学会 . -1

机译：通过使用铅钛酸盐（PTO）播种层，降低通过溶液燃烧合成方法合成的锆钛酸钛酸盐（PZT）薄膜的结晶温度
5. Printable Thin-Film Sol-Gel Lead Zirconate Titanate (PZT) Deposition Using NanoJet and Inkjet Printing Methods [D] . Marotta, Amanda R. 2019

机译：可印刷薄膜溶胶 - 凝胶锆钛酸钛酸酯（PZT）沉积使用纳米喷射和喷墨印刷方法
6. Phase Evolution Filler-Matrix Interactions and Piezoelectric Properties in Lead Zirconate Titanate (PZT)-Filled Polymer-Derived Ceramics (PDCs) [O] . Franziska Eichhorn, Simone Kellermann, Ulf Betke, 2020

机译：锆钛酸铅（PZT）填充的聚合物衍生陶瓷（PDC）中的相变填料-基体相互作用和压电特性
7. Ordered Mesoporous Thin Film Ferroelectrics of Biaxially Textured Lead Zirconate Titanate (PZT) by Chemical Solution Deposition [O] . Reitz, Christian, Leufke, Philipp M., Hahn, Horst, 2014

机译：化学溶液沉积法制备双轴织构钛酸铅锆酸盐（PZT）的有序介孔薄膜铁电体

Processing Method for Creating Ultra-Thin Lead Zirconate Titanate (PZT) Films Via Chemical Solution Deposition

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