A METHOD OF INCREASING THE CONVERSION EFFICIENCY OF AN EUV LAMP AND SOFT X-RAY LAMP, AND AN APPARATUS FOR PRODUCING EUV RADIATION AND SOFT X-RAYS

摘要

The present invention is a method of increasing the efficiency of the EUV light at least one switch and the soft X- ray lamp relates, discharge plasma emitting EUV radiation or soft X- ray 8 is generated by the gas medium is formed by a liquid material vaporized in the discharge space, the liquid material is at least in part by an energy beam (9) is vaporized and provided to the surface in the discharge space. The invention also relates to a corresponding device for generating EUV radiation, and at least one of the soft X- ray. In this way, in order to reduce the density of the vaporized liquid material in the discharge space, a mixed gas into a chemical element having a lower mass number than chemical elements of the liquid material (11) is, at least one nozzle in such a way that the control ( 10) along, is provided with at least one of the liquid material along the supply path to the discharge space and the discharge space, characterized in that. The present method and response of the lamp due to a unit conversion efficiency is increased.