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High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments

机译：EUV和软X射线的高效多层闪光光栅：最近的发展

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Dmitriy L. Voronov; Minseung Ahn; Eric H. Anderson; Rossana Cambie; Chih-Hao Chang; Leonid I. Goray; Eric M. Gullikson; Ralf K. Heilmann; Farhad Salmassi; Mark L. Schattenburg; Tony Warwick; Valeriy Yashchuk; Howard A. Padmore;
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1. Fabrication of high-efficiency multilayer-coated binary blazed gratings in the EUV regime [J] . Patrick P. Naulleau, Erik H. Anderson, Eric M. Gullikson, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2001,第1a6期

机译：在EUV体制中制备高效多层涂层二元闪耀光栅
2. High-efficiency X-ray multilayer-coated blazed gratings with shifted boundaries [J] . Lubov Maxim, Goray Leonid Journal of synchrotron radiation . 2019,第5期

机译：高效的X射线多层涂层带有偏移边界的闪光灯
3. Blaze of Multilayer Diffraction Gratings in the Soft X-Ray Range: Growth Design Taking into Account the Deformation of Groove Profiles [J] . L. I. Goray, M. N. Lubov Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2019,第1期

机译：软X射线范围内的多层衍射光栅的膨胀：生长设计考虑了沟槽型材的变形
4. High efficiency multilayer blazed gratings for EUV and soft X-rays: Recent developments [C] . Dmitriy L. Voronov, Minseung Ahn, Erik H. Anderson, Advances in x-ray/EUV optics and components V . 2010

机译：用于EUV和软X射线的高效多层火焰光栅：最新进展
5. Optical constants of materials in the EUV/soft x-ray region for multilayer mirror applications. [D] . Soufli, Regina. 1997

机译：用于多层反射镜的EUV /软X射线区域中材料的光学常数。
6. Damage thresholds for blaze diffraction gratings and grazing incidence optics at an X-ray free-electron laser [O] . Jacek Krzywinski, Raymond Conley, Stefan Moeller, -1

机译：X射线自由电子激光器的闪耀衍射光栅和掠入射光学器件的损伤阈值
7. Fabrication of high-efficiency multilayer-coated binary blazed gratings in the EUV regime [O] . Patrick P. Naulleau, Erik H. Anderson, Eric M. Gullikson, 2001

机译：在EUV制度中制造高效多层涂层二元闪耀光栅

High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments

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