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Laser beam size control mechanism and laser repair apparatus using the same

机译:激光束尺寸控制机构及使用该机构的激光修复装置

摘要

The present invention relates to a laser beam size adjusting instrument and a laser repair device using the same. The laser beam size adjusting instrument includes: a case (131) in which light transmitting holes (LH) for a laser beam (L) to pass through are formed at the top and the bottom; a first slit moving unit (132) which is installed in a first direction (X) inside the case (131); a second slit moving unit (133) which is installed in a second direction (Y) perpendicular to the first direction (X) inside the case (131); and multiple slit plates (134, 145, 136, 137) which are respectively installed in the first slit moving unit (132)and in the second slit moving unit (133)and adjust the width (B1, B2) of the laser beam (L) passing through the light transmitting holes (LH) in the first direction (X) and the second direction (Y). The multiple slit plates (134, 145, 136, 137) are placed with at least one height adjusting block (138) in the first slit moving unit (132) and the second slit moving unit (133) and are moved at different heights. Therefore, the multiple slit plates are prevented from colliding to each other when the slit plates are cross-moved, thereby enhancing the operation reliability.
机译:激光束尺寸调整仪及使用该激光束尺寸调整仪的激光修复装置技术领域本发明涉及激光束尺寸调整仪及使用该激光束尺寸调整仪的激光修复装置。激光束尺寸调整装置包括:壳体(131),在其顶部和底部形成有用于使激光束(L)通过的透光孔(LH)。第一狭缝移动单元(132)沿第一方向(X)安装在壳体(131)内;第二狭缝移动单元(133)沿垂直于第一方向(X)的第二方向(Y)安装在壳体(131)内。多个狭缝板(134、145、136、137)分别安装在第一狭缝移动单元(132)和第二狭缝移动单元(133)中,并调节激光束的宽度(B1,B2)( L)沿第一方向(X)和第二方向(Y)穿过透光孔(LH)。多个狭缝板(134、145、136、137)与至少一个高度调节块(138)一起放置在第一狭缝移动单元(132)和第二狭缝移动单元(133)中,并且以不同的高度移动。因此,当狭缝板交叉移动时,防止了多个狭缝板彼此碰撞,从而提高了操作可靠性。

著录项

  • 公开/公告号KR101434625B1

    专利类型

  • 公开/公告日2014-08-26

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20120075642

  • 发明设计人 권태균;김정환;이승지;

    申请日2012-07-11

  • 分类号H01S3/101;G02F1/13;H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-21 15:40:12

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