Batch plant e.g. vacuum coating plant for processing tubular substrates for solar heat collectors, has carrier and substrate carrier train that are arranged to form prism or truncated pyramid shaped structure in process chamber

摘要

The batch plant has a transport unit which moves the carrier carrying the substrates into or out of the process chamber (1) attached to loading chamber (2). The carriers are connected to substrate carrier train by coupling elements. The transport unit is configured such that substrate carrier train is movable along rectilinear substrate transport direction (8) and linear loading direction (7). The carrier and substrate carrier train are arranged to form prism or truncated pyramid shaped structure in the process chamber. An independent claim is included for method for treatment of substrates in batch process.