Vacuum coating apparatus useful for coating disc-shaped substrates, comprises a plant chamber limited by chamber walls, having opening that is closable by a vacuum-tight chamber lid, a transport device and coating device with tubular target

摘要

Vacuum coating apparatus comprises: a plant chamber (2) limited by chamber walls (21), having an opening that is closable by a vacuum-tight chamber lid (23); a transport device (4) arranged within the plant chamber; and at least one coating device (3) with a vertically arranged tubular target, whose lower end comprises a lower rotary bearing device, and whose upper end comprises an upper rotary bearing device. The upper rotary bearing device comprises a connection device that is connected with the tubular target, and is adjustable in an axial direction of the tubular target. Vacuum coating apparatus comprises: a plant chamber (2) limited by chamber walls (21), having an opening that is closable by a vacuum-tight chamber lid (23); a transport device (4) arranged within the plant chamber, for vertical transport of disk-shaped substrates; and at least one coating device (3) with a vertically arranged tubular target, whose lower end comprises a lower rotary bearing device, and whose upper end comprises an upper rotary bearing device. The upper rotary bearing device comprises a connection device that is connected with the tubular target, and is adjustable in an axial direction of the tubular target. The connection device in a first setting is connected with an upper end of the tubular target, and in a second setting has an axial distance from the upper end of the tubular target. An independent claim is also included for a lifting gear for lifting the tubular target either in horizontal or vertical orientation, comprising a first carrier for mounting the lifting gear on a crane hook at an upper end of the first carrier, and a second carrier, whose both the ends comprise gripping devices each for detecting an end of the tubular target. The central region of the second carrier: is connected with the lower end of the first carrier and rotates to-and-fro between a horizontal orientation and a vertical orientation; and is locked at least in the vertical direction.