Vacuum-substrate treatment plant for plate-shaped substrates, has vacuum chamber with valve for inserting substrate in vacuum chamber, where guiding unit is arranged at outer side of vacuum chamber in area of valve with guiding elements

摘要

The vacuum-substrate treatment plant has a vacuum chamber with a slot-shaped valve for inserting plate-shaped substrate (8) in the vacuum chamber, where a guiding unit is arranged at the outer side of the vacuum chamber in the area of the slot-shaped valve with two guiding elements (5). Each guiding element is arranged at an end of the slot-shaped valve, so that the plate-shaped substrate is inserted in the center in the slot-shaped substrate. The guiding elements have an insertion bevel on their sides facing away from the slot-shaped valve.