Coating material used for aluminum die-casting mold, has chromium nitride bonding layer, titanium aluminum nitride/chromium nitride nano multilayer and titanium aluminum nitride/chromium silicide carbonitride nano multilayer

摘要

Coating material comprises a chromium nitride (CrN) bonding layer formed on a surface of a substrate, a titanium aluminum nitride (TiAlN)/CrN nano multilayer disposed on a surface of the bonding layer of CrN, and a TiAlN/chromium silicide carbonitride (CrSi(C)N)-nano multilayer disposed on a surface of the TiAlN/CrN nano multilayer. Manufacturing a coating material comprising (a) depositing a CrN bonding layer on a surface of a substrate using a Cr-target under nitrogen gas (N2) atmosphere by spraying nitrogen gas (N2) through a gas inlet of a chamber, (b) depositing a TiAlN/CrN nano multilayer on a surface of the deposited CrN bonding layer using a TiAl target and the Cr target and (c) depositing a TiAlN/CrSiN nano multilayer on a surface of the deposited TiAlN/CrN nano multilayer using the TiAl targets and CrSi targets.