Multilayer laminate for packaged tools, has oxide-containing layer and nitride containing layer containing titanium, chromium, vanadium, zirconium, tungsten, silicon and/or aluminum

摘要

A multilayer laminate has oxide-containing layer and nitride containing layer. The multilayer laminate has thickness of 0.1-1 mu m. The oxide and nitride-containing layers contain titanium, chromium, vanadium, zirconium, tungsten, silicon and/or aluminum. The single layer thickness of multilayer laminate is 0.02-1 mu m.