A method of identifying abnormal spectral profiles measured by a chromatic confocal range sensor

摘要

A method of operating a chromatic range sensor (CRS) system is provided to identify abnormal spectral profiles resulting from light reflected from more than a portion of a workpiece surface. The method includes: providing a CRS system that includes: an optical element, a light source, and CRS electronics that include a CRS wavelength detector; Operating the CRS system to receive an output spectral profile from a measurement point on a workpiece surface and the corresponding output spectral profile data; Analyzing the output spectral profile data to provide asymmetry characterization of the peak region; and providing a corresponding anomaly indicator when the asymmetry characterization of the tip area indicates that the tip area is abnormally asymmetric.