Method for identifying abnormal spectral profiles measured by a chromatic confocal range sensor

摘要

A method for operating a chromatic range sensor (CRS) system to identify abnormal spectral profiles arising from light reflected from more than one portion of a workpiece surface is provided. The method comprises: providing a CRS system comprising: an optical element, a light source, and CRS electronics comprising a CRS wavelength detector; operating the CRS system to receive an output spectral profile from a measurement point on a workpiece surface and provide corresponding output spectral profile data; analyzing the output spectral profile data to provide a peak region asymmetry characterization; and providing a corresponding abnormality indicator if the peak region asymmetry characterization indicates that the peak region is abnormally asymmetric.