Spectrally-resolved chromatic confocal interferometry for one-shot nano-scale surface profilometry with several tens of micrometric depth range

摘要

In this research,new nano-scale measurement methodology based on spectrally-resolved chromatic confocal interferometry (SRCCI) was successfully developed by employing integration of chromatic confocal sectioning and spectrally-resolve white light interferometry (SRWLI) for microscopic three dimensional surface profilometry.The proposed chromatic confocal method (CCM) using a broad band while light in combination with a specially designed chromatic dispersion objective is capable of simultaneously acquiring multiple images at a large range of object depths to perform surface 3-D reconstruction by single image shot without vertical scanning and correspondingly achieving a high measurement depth range up to hundreds of micrometers.A Linnik-type interferometric configuration based on spectrally resolved white light interferometry is developed and integrated with the CCM to simultaneously achieve nanoscale axis resolution for the detection point.The white-light interferograms acquired at the exit plane of the spectrometer possess a continuous variation of wavelength along the chromaticity axis,in which the light intensity reaches to its peak when the optical path difference equals to zero between two optical arms.To examine the measurement accuracy of the developed system,a pre-calibrated accurate step height target with a total step height of 10.10 μm was measured.The experimental result shows that the maximum measurement error was verified to be less than 0.3％ of the overall measuring height.