DRIVE DEVICE FOR MICROPUMP AND MICROVALVE AND MICRO FLUID DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a drive device for driving a micropump and a microvalve capable of easily controlling pump capacity and ensuring low loss.SOLUTION: A micropump and microvalve drive device comprises: a pump drive unit 7a that includes a micropump 50a operating in response to expansion or contraction of a first shape memory alloy wire 5a, a wiring portion 6a in parallel to the first shape memory alloy wire 5a, a first changeover switch 4a selecting one of a state of carrying a current only to the first shape memory alloy wire 5a and a state of carrying a current to the wiring portion 6a; a valve drive unit 10a that includes a microvalve 51a operating in response to expansion or contraction of a plurality of second shape memory alloy wires 9a, and a second changeover switch 8a setting one of the second shape memory alloy wires 9a into a current carrying state; a switch 3; a valve control unit 11a controlling the second changeover switch 8a and the switch 3; and a pump control unit 12a controlling a period in which a current is carried only to the first shape memory alloy wire 5a in a state in which the switch 3 is turned on.