SURVEY METHOD AND PROBE OF INNER STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a survey method and a probe of an inner structure which can detect, via a structure on a near side, expanse of a rear space thereof, a surface shape of a structure on a depth side, and an arranged object.;SOLUTION: A method of surveying an inner structure of a measurement object 50 excluding a second measured part 52 for the measurement object 50 in which at least a first measured part 51 and the tabular second measured part 52 are arranged so as to face each other via a prescribed space 54, comprises: a transmission step of transmitting an ultrasonic wave to the second measured part 52; a reception step of receiving the ultrasonic wave which is reflected in at least the first measured part 51 and passed through the prescribed space 54 and the second measured part 52 after passing through the second measured part 52 constituted by material having acoustic impedance with a lower value than metal material and the prescribed space 54, and a display step of displaying information on the inner structure of the measurement object 50 on the basis of a signal related to the received ultrasonic wave.;COPYRIGHT: (C)2015,JPO&INPIT