X-RAY DIFFRACTION DEVICE, METHOD FOR MEASURING X-RAY DIFFRACTION, AND CONTROL PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide an X-ray diffraction device, a method for measuring X-ray diffraction, and a control program capable of reducing a total exposure time and increasing the efficiency of measurement.;SOLUTION: Provided is an X-ray diffraction device for irradiating a sample with an X-ray and frame-photographing at each X-ray diffraction angle, the X-ray diffraction device comprising: a control unit 141 for controlling frame-photographing by scanning without closing a shutter; a data acquisition unit 142 for importing, by frame-photographing, the detection data of each frame detected by a semiconductor pixel detector; a frame integration unit 146 for integrating, for each frame, the detection data imported for each scan; and a determination unit 147 for determining whether the integrated detection data has sufficient intensity. The control unit 141 exerts control in such a way that measurement is terminated when the integrated detection data has sufficient intensity, and scanning is performed again when the integrated detection data does not have sufficient intensity.;COPYRIGHT: (C)2015,JPO&INPIT