pellicle frame, method of manufacturing a pellicle and pellicle frame

摘要

PROBLEM TO BE SOLVED: To provide a pellicle frame capable of suppressing damage of a coating film when coating with a coating material; and to provide a pellicle and a method for manufacturing the pellicle frame.SOLUTION: In a pellicle frame 2 of a pellicle 1, a glass transition point of the coating material is defined as not less than 50°C and not more than 350°C in a coating of a frame member comprising aluminum or aluminum alloy. Even if the pellicle frame 2 is bent, the adhesion between the pellicle frame 2 and the coating material is thus secured so as to prevent peeling of a coating film P. Alternatively, the pellicle frame has prescribed strength so as to prevent scraping of the coating film P with a handling tool or the like. This constitution can thus suppress the damage of the coating film P such as crack.