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PELLICLE SUPPORT FRAME, PELLICLE, METHOD FOR MANUFACTURING PELLICLE SUPPORT FRAME, AND EXPOSURE ORIGINAL PLATE AND EXPOSURE DEVICE EMPLOYING PELLICLE
PELLICLE SUPPORT FRAME, PELLICLE, METHOD FOR MANUFACTURING PELLICLE SUPPORT FRAME, AND EXPOSURE ORIGINAL PLATE AND EXPOSURE DEVICE EMPLOYING PELLICLE
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机译:薄膜支撑框架,薄膜,制造薄膜支撑框架的方法,以及采用薄膜的曝光原始板和曝光装置
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摘要
A support frame for pellicle is provided including a first support frame part, a second support frame part, and a filter, wherein the filter has a flat plate-shaped frame shape and is sandwiched by the first support frame part and the second support frame part, the first support frame part includes a first body part having a flat plate-shaped frame shape and a first engaging portion protruded from the first body part to a thickness direction of the support frame for pellicle, and the second support frame part includes a second body part having a flat plate-shaped frame shape and a second engaging portion of the second body part engaging with the first engaging portion being arranged in a concave part provided in the thickness direction of the support frame for pellicle.
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