首页> 外国专利> How to provide an air flow management system and air flow management system for reducing the number of particles in the processing tool.

How to provide an air flow management system and air flow management system for reducing the number of particles in the processing tool.

机译:如何提供一种气流管理系统和气流管理系统,以减少处理工具中的颗粒数量。

摘要

In various exemplary embodiments described [SOLUTION] herein, a method and related system for providing an air flow management in board production tool, fan filter unit for providing filtered air into the housing a substrate transfer section connected to the housing for connecting the board production tools, equipment and joints for connecting the vacuum exhaust mechanism board production tool, below the housing, communicating the airflow between the equipment and the coupling portion, I and a substrate processing area connected to the substrate transfer section by the substrate transfer slots of one or more. Chamber for encapsulating substantially substrate processing area and the substrate transfer section, with is coupled to the housing for receiving the filtered air, and is connected to the equipment connecting portion to provide a discharge of excess air flow. Chamber is maintained at a lower pressure than the substrate transfer section of the substrate processing area. [Selection Figure 6
机译:在本文描述的各种示例性实施例中,一种用于在板生产工具中提供空气流管理的方法和相关系统,用于将过滤后的空气提供到壳体中的风扇过滤器单元,连接到壳体的基板传送部分以连接板生产工具。 ,用于连接真空排气机构板生产工具的设备和接头,位于壳体下方,用于连通设备和连接部分之间的气流,I和通过一个或多个基板传送槽连接至基板传送部分的基板处理区域。用于基本密封基板处理区域的腔室和基板传送部分与腔室相连,用于接收过滤后的空气,并与设备连接部分相连,以排出多余的空气流。将腔室维持在比基板处理区域的基板传送部低的压力下。 [选择图6

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号