A method of generating extreme ultraviolet light source device and extreme ultraviolet light .

摘要

PROBLEM TO BE SOLVED: To enhance CE of an EUV light generating device.;SOLUTION: The extreme ultraviolet light source device may comprise a laser beam generation system, a laser control system which controls either the optical intensity and/or the output timing of at least one laser beam output from the laser beam generation system, a chamber 1 provided with at least one incident port through which at least one laser beam output from the laser beam generation system is introduced, and a target supply section 2 provided on the chamber 1 and supplying a target material to a predetermined region in the chamber 1.;COPYRIGHT: (C)2012,JPO&INPIT