Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model

摘要

The ionization balance of the bismuth-to-tin plasmas is systematically investigated on the basis of a collisional radiative model, which has been generated using a computer algorithm to analyze the level structure of multiple charged ions to construct the model. The atomic energy levels and rate coefficients corresponding to the model are calculated using the HULLAC code. With this method, we investigate the plasma temperature, which is required to obtain emission in the extreme ultraviolet wavelength range from 13.5 nm to the water window.