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Porous template and imprinting stack for nano-imprint lithography.

机译:用于纳米压印光刻的多孔模板和压印堆栈。

摘要

An imprint lithography template or imprinting stack includes a porous material defining a multiplicity of pores with an average pore size of at least about 0.4 nm. A porosity of the porous material is at least about 10%. The porous template, the porous imprinting stack, or both may be used in an imprint lithography process to facilitate diffusion of gas trapped between the template and the imprinting stack into the template, the imprinting stack or both, such that polymerizable material between the imprinting stack and the template rapidly forms a substantially continuous layer between the imprinting stack and the template.
机译:压印光刻模板或压印叠层包括多孔材料,所述多孔材料限定平均孔径至少为约0.4nm的多个孔。多孔材料的孔隙率至少约为10%。多孔模板,多孔压印叠层或两者可用于压印光刻工艺中,以促进捕获在模板和压印叠层之间的气体扩散到模板,压印叠层或两者之中,从而使压印叠层之间的可聚合材料扩散。模板迅速在压印叠层和模板之间形成基本连续的层。

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