Anomaly detection method of abnormality detection device, a heat treatment apparatus and heat treatment apparatus of the heat treatment apparatus, as well as, anomaly detection method of program

摘要

PROBLEM TO BE SOLVED: To provide an abnormality detection device of a heat treatment apparatus, a heat treatment apparatus or an abnormality detection method capable of detecting abnormality or a sign of the abnormality of a heat generator or a connection conductive body by detecting a temperature of the connection conductive body which supplies electric power to the heat generator.;SOLUTION: An abnormality detection device, a heat treatment apparatus or an abnormality detection method with which a heat treatment apparatus for performing heat treatment of a substrate arranged in a treatment chamber by using a heat generator is provided, comprises: the connection conductive body which supplies electric power outputted from an electric source to the heat generator; a detection part which detects a temperature of the connection conductive body; and a judgment part which judges operation state of the connection conductive body and/or operation state of the heat generator based on the temperature detected by the detection part.;COPYRIGHT: (C)2014,JPO&INPIT