首页> 外国专利> PLASMA-ASSISTED CHEMICAL GAS SEPARATION METHOD HAVING INCREASED PLASMA DENSITY AND DEVICE FOR IMPLEMENTING THE METHOD

PLASMA-ASSISTED CHEMICAL GAS SEPARATION METHOD HAVING INCREASED PLASMA DENSITY AND DEVICE FOR IMPLEMENTING THE METHOD

机译：等离子体密度提高的等离子体辅助化学气体分离方法及实施该方法的装置

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摘要

The invention relates to a method and a device for coating surfaces of a substrate (8) according to the technique of plasma-assisted chemical vapor deposition. The basic idea of the present invention is to increase the ion concentration prevailing in the plasma so as to have more ions accumulate on the substrate (8) and to promote layer growth (12). According to the invention, the ion concentration is increased by forming a so-called fireball at the surface of the substrate (8) to be coated. The term fireball refers to the ionization processes that occur on electrode surfaces (2) as spontaneous small brightly luminescent phenomena in plasma processes. To this end, an electrode (2) is introduced into an existing background plasma and connected to a positive potential (4).

机译：本发明涉及一种根据等离子体辅助化学气相沉积技术涂覆基底（ 8 ）表面的方法和装置。本发明的基本思想是增加等离子体中普遍存在的离子浓度，以使更多的离子积累在基板上（ 8 ）并促进层生长（ 12 ）。根据本发明，通过在要涂覆的衬底（ 8 ）的表面上形成所谓的火球来增加离子浓度。火球一词是指在电极表面（ 2 ）上发生的电离过程，是等离子体过程中自发的小的明亮发光现象。为此，将电极（ 2 ）引入现有的背景等离子体中并连接到正电势（ 4 ）。 展开▼

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公开/公告号US2015170902A1

专利类型

公开/公告日2015-06-18

原文格式PDF

申请/专利权人 FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;
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申请/专利号US201314406258

发明设计人 JACOB REYNVAAN;JOHANNES GRÜNWALD;
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申请日2013-05-08

分类号H01L21/02;C23C16/50;H01L21/67;

国家 US

入库时间 2022-08-21 15:26:15

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