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HIGH-K DIELECTRICS WITH A LOW-K INTERFACE FOR SOLUTION PROCESSED DEVICES
HIGH-K DIELECTRICS WITH A LOW-K INTERFACE FOR SOLUTION PROCESSED DEVICES
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机译:具有低K介面的高K介电体,可用于解决方案的设备
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摘要
A device, including a substrate, an electronically active component on the substrate, an interface dielectric on the semiconductor, and a relaxor dielectric on the interface dielectric. The relaxor dielectric includes a surfactant that is solid at room temperature.
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