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PIEZORESISTANCE SENSOR MODULE AND MEMS SENSOR HAVING THE SAME
PIEZORESISTANCE SENSOR MODULE AND MEMS SENSOR HAVING THE SAME
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机译:压电电阻传感器模块和MEMS传感器具有相同的功能
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摘要
Disclosed herein is a piezoresistance sensor module including: a piezoresistor, a depletion layer formed in a region of a portion of the piezoresistor, an insulator formed to cover the depletion layer and one surface of the piezoresistor, and a piezoelectric capacitor formed on the insulator so as to be opposite to the depletion layer.
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