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Strain engineering in semiconductor devices by using a piezoelectric material
Strain engineering in semiconductor devices by using a piezoelectric material
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机译:使用压电材料的半导体器件中的应变工程
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摘要
An efficient strain-inducing mechanism may be provided on the basis of a piezoelectric material so that performance of different transistor types may be enhanced by applying a single concept. For example, a piezoelectric material may be provided below the active region of different transistor types and may be appropriately connected to a voltage source so as to obtain a desired type of strain.
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