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Microlithography projection system with an accessible diaphragm or aperture stop
Microlithography projection system with an accessible diaphragm or aperture stop
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机译:带有可触及的光圈或孔径光阑的微光刻投影系统
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摘要
The invention relates to a microlithography projection lens for wavelengths =248 nm =, preferably =193 mm, in particular EUV lithography for wavelengths ranging from 1-30 nm for imaging an object field in an object plane onto an image field in an image plane, the microlithography projection lens developed in such a manner that provision is made for an accessible diaphragm plane, into which for instance an iris diaphragm can be introduced.
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