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Method of storing lanthanum oxide target, and vacuum-sealed lanthanum oxide target
Method of storing lanthanum oxide target, and vacuum-sealed lanthanum oxide target
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机译:储存氧化镧靶的方法和真空密封的氧化镧靶
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摘要
A method of storing a sputtering target made of lanthanum oxide, wherein a lanthanum oxide target to which a lanthanum fluoride film was formed and lanthanum oxide powder are charged in a vacuum pack with an oxygen transmission rate of 0.1 cm3/m2 per 24 h at 1 atm or less and a moisture vapor transmission rate of 0.1 g/m2 per 24 h or less, and, after charging the target and the powder, the vacuum pack is subject to vacuum suction and sealing for storage. This invention aims to provide technology for enabling the long-term storage of a sputtering target in a usable state by devising the method of storing a target made of an oxide of lanthanum as a rare earth metal, and thereby inhibiting the pulverization phenomenon of the target caused by the hydration (hydroxylation) of such target due to residual air or the inclusion of air, and the pulverization phenomenon caused by the formation of carbonate.
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机译:一种储存由氧化镧制成的溅射靶的方法,其中将形成有氟化镧膜的氧化镧靶和氧化镧粉末装入氧气透过率为0.1cm 3 Sup的真空包装中。在给目标充电后,在1个大气压以下时,每24小时> / m 2 Sup>,并且在24小时或更短时间内,水蒸气透过率是0.1 g / m 2 Sup>对于粉末,对真空包装进行真空抽吸和密封以进行存储。本发明旨在提供一种技术,该技术通过设计一种存储由镧的氧化物作为稀土金属制成的靶的方法,从而能够以可用状态长期存储溅射靶,从而抑制靶的粉碎现象。由于残留空气或空气的夹杂而使这种靶的水合(羟基化)引起的粉化现象,以及由碳酸盐的形成引起的粉化现象。
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