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Structure and method for single crystal silicon-based plasma light source and flat panel display panels and micro plasma sources
Structure and method for single crystal silicon-based plasma light source and flat panel display panels and micro plasma sources
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机译:单晶硅基等离子体光源的结构和方法以及平板显示面板和微等离子体源
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摘要
Silicon substrate having (100) crystal orientation can be wet etched to form (111) sharp tip pyramids. The sharp tip pyramids can be used to fabricate electrodes for flat panel displays, such as a plasma display panel or a field emission display.
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