Method and apparatus for fabricating high purity silicon compacts using silicon powders, and binder-free silicon compact fabricated by the same

摘要

Disclosed are a method and an apparatus for fabricating solar-grade high purity polycrystalline silicon compacts. Silicon compacts are fabricating by loading polycrystalline silicon powders into a mold without addition of binders in a vacuum atmosphere, and pressurizing and heating the polycrystalline silicon powders. Heating method includes a high-frequency induction heating type, an Ohmic heating type, and a high current supply type.